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  • Metrology Instruments

    Alicona Infinite focus-Optical 3D measurement & inspection

    • Non-contact, optical 3 dimensional, based on Focus-Variation
    • Surface profile form and roughness measurement
    • Surface topography Ra above 10-15 nm with a Lc of 2um, surface structure dependent
    • Minimum vertical repeatability less than 0.12 um
    • Best vertical resolution in the range of 10 to 410 nm
    • Fully automated and programmable xyz stages
    • Less than 400 um/sec scan speed
    • 5x, 20x, 50x and 100x objective










    ZYGO NewViewTM 7300 Non-destructive 3D surface metrology tool

    • Surface height measurement from less than 1nm to 20 mm
    • Sub-nanometer resolution
    • Less than 0.01 nm RMS repeatability
    • Fully automated and programmable xyz stages
    • Less than 135 um/sec scan speed
    • 10x and 50x objectives
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